Design and Analysis of Cantilever Beam Electrostatic Actuators

The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and the parameters are estimated. Extracting the mechanical properties of MEMS devices has always been a challenge in terms of test time and test cost due to difficulties associated with accurate characterization of thin films. A technique for diagnosing the mechanical parameters of a cantilever-beam accelerometer using purely electrical test stimulus was given by Vishwanath Natarajan et al (2006). Governing equations of an electrostatically actuated clamped–clamped and a cantilever narrow microbeam; and an expression for the distributed electrostatic force that simulates well the fringing field effects was derived by Romesh C. Batra (2006). The dependence of the critical tilting angle and pullin voltage on the sizes of structure was investigated by Jian-Gang Guo (2004).